Electrostatic discharge protection device and electronic device having the same

ABSTRACT

In an ESD protection device, a first well of a first conductivity type and a second well of a second conductivity type are formed in a substrate to contact each other. A first impurity region of the first conductivity type and a second impurity region of the second conductivity type are formed in the first well, and are electrically connected to a first electrode pad. The second impurity region is spaced apart from the first impurity region in a direction of the second well. A third impurity region is formed in the second well, has the second conductivity type, and is electrically connected to a second electrode pad. A fourth impurity region is formed in the second well, is located in a direction of the first well from the third impurity region to contact the third impurity region, has the first conductivity type, and is electrically floated.

CROSS-REFERENCE TO RELATED APPLICATION(S)

This application claims priority under 35 USC §119 to Korean PatentApplication No. 10-2014-0174759, filed on Dec. 8, 2014 in the KoreanIntellectual Property Office (KIPO), the contents of which are hereinincorporated by reference in their entirety.

BACKGROUND

1. Technical Field

Exemplary embodiments in accordance with principles of inventiveconcepts relate to electrostatic discharge (ESD) protection technology,and more particularly to an ESD protection device and an electronicdevice including the ESD protection device.

2. Description of the Related Art

As the size of semiconductor devices decrease and the density ofsemiconductor devices increases, an ESD protection device, whichprotects the semiconductor device from damage caused by an ESD, becomesmore important.

Conventionally, a diode, a resistor, and a transistor are generally usedin an ESD protection device. More recently, a silicon controlledrectifier (SCR) is widely used as an ESD protection device.

However, when the holding voltage of the SCR is lower than anoperational voltage of the semiconductor device, the semiconductordevice may not operate correctly.

SUMMARY

Some exemplary embodiments are directed to provide an electrostaticdischarge (ESD) protection device that has a high holding voltage.

Some exemplary embodiments are directed to provide an electronic deviceincluding the ESD protection device.

According to exemplary embodiments, an electrostatic discharge (ESD)protection device includes a semiconductor substrate, a first well, asecond well, a first impurity region, a second impurity region, a thirdimpurity region, and a fourth impurity region. The first well is formedin the semiconductor substrate, and has a first conductivity type. Thesecond well is formed in the semiconductor substrate, contacts the firstwell, and has a second conductivity type. The first impurity region isformed in the first well, has the first conductivity type, and iselectrically connected to a first electrode pad. The second impurityregion is formed in the first well, is spaced apart from the firstimpurity region in a direction of the second well, has the secondconductivity type, and is electrically connected to the first electrodepad. The third impurity region is formed in the second well, has thesecond conductivity type, and is electrically connected to a secondelectrode pad. The fourth impurity region is formed in the second well,is located in a direction of the first well from the third impurityregion to contact the third impurity region, has the first conductivitytype, and is electrically floated.

In exemplary embodiments, the ESD protection device may further includea fifth impurity region. The fifth impurity region may be formed in thesecond well, be spaced apart from the fourth impurity region in adirection of the first well, have the second conductivity type, and beelectrically floated.

An impurity concentration of the fifth impurity region may be higherthan an impurity concentration of the second well.

A holding voltage of the ESD protection device may be determined basedon a width of the fifth impurity region.

The ESD protection device may further include a sixth impurity regionand a gate. The sixth impurity region may be formed at a boundary regionbetween the first well and the second well, have the second conductivitytype, and is electrically floated. The gate may be formed above thesemiconductor substrate between the second impurity region and the sixthimpurity region, and be electrically connected to the first electrodepad.

An impurity concentration of the sixth impurity region may be higherthan an impurity concentration of the second well.

Impurity concentrations of the first impurity region and the fourthimpurity region may be substantially the same, and impurityconcentrations of the second impurity region, the third impurity region,the fifth impurity region, and the sixth impurity region may besubstantially the same.

The first impurity region and the fourth impurity region may be formedat the same time by a same ion implantation process, and the secondimpurity region, the third impurity region, the fifth impurity region,and the sixth impurity region may be formed at the same time by a sameion implantation process.

In exemplary embodiments, the ESD protection device may further includea fifth impurity region. The fifth impurity region may be formed in thefirst well, be spaced apart from the second impurity region in adirection of the second well, have the first conductivity type, and beelectrically floated.

An impurity concentration of the fifth impurity region may be higherthan an impurity concentration of the first well.

A holding voltage of the ESD protection device may be determined basedon a width of the fifth impurity region.

The ESD protection device may further include a sixth impurity regionand a gate. The sixth impurity region may be formed at a boundary regionbetween the first well and the second well, have the first conductivitytype, and be electrically floated. The gate may be formed above thesemiconductor substrate between the fourth impurity region and the sixthimpurity region, and be electrically connected to the second electrodepad.

An impurity concentration of the sixth impurity region may be higherthan an impurity concentration of the first well.

Impurity concentrations of the second impurity region and the thirdimpurity region may be substantially the same, and impurityconcentrations of the first impurity region, the fourth impurity region,the fifth impurity region, and the sixth impurity region may besubstantially the same.

The second impurity region and the third impurity region may be formedat the same time by a same ion implantation process, and the firstimpurity region, the fourth impurity region, the fifth impurity region,and the sixth impurity region may be formed at the same time by a sameion implantation process.

In exemplary embodiments, the first conductivity type may correspond ton-type, and the second conductivity type may correspond to p-type.

The first electrode pad may be coupled to a supply voltage, and thesecond electrode pad may be coupled to a ground voltage.

In exemplary embodiments, the first conductivity type may correspond top-type, and the second conductivity type may correspond to n-type.

The first electrode pad may be coupled to a ground voltage, and thesecond electrode pad may be coupled to a supply voltage.

According to exemplary embodiments, an ESD protection device includes asemiconductor substrate, a first well, a second well, a first impurityregion, a second impurity region, a third impurity region, a fourthimpurity region, a fifth impurity region, a sixth impurity region, and agate. The first well is formed in the semiconductor substrate, and has afirst conductivity type. The second well is formed in the semiconductorsubstrate, contacts the first well, and has a second conductivity type.The first impurity region is formed in the first well, has the firstconductivity type, and is electrically connected to a first electrodepad. The second impurity region is formed in the first well, is spacedapart from the first impurity region in a direction of the second well,has the second conductivity type, and is electrically connected to thefirst electrode pad. The third impurity region is formed in the secondwell, has the second conductivity type, and is electrically connected toa second electrode pad. The fourth impurity region is formed in thesecond well, is spaced apart from the third impurity region in adirection of the first well, has the first conductivity type, and iselectrically connected to the second electrode pad. The fifth impurityregion is formed in the second well, is spaced apart from the fourthimpurity region in a direction of the first well, has the secondconductivity type, and is electrically floated. The sixth impurityregion is formed at a boundary region between the first well and thesecond well, has the second conductivity type, and is electricallyfloated. The gate is formed above the semiconductor substrate betweenthe second impurity region and the sixth impurity region, and iselectrically connected to the first electrode pad.

In exemplary embodiments, an impurity concentration of the fifthimpurity region and an impurity concentration of the sixth impurityregion may be higher than an impurity concentration of the second well.

In exemplary embodiments, a holding voltage of the ESD protection devicemay be determined based on a width of the fifth impurity region.

In exemplary embodiments, impurity concentrations of the first impurityregion and the fourth impurity region may be substantially the same, andimpurity concentrations of the second impurity region, the thirdimpurity region, the fifth impurity region, and the sixth impurityregion may be substantially the same.

In exemplary embodiments, the first impurity region and the fourthimpurity region may be formed at the same time by a same ionimplantation process, and the second impurity region, the third impurityregion, the fifth impurity region, and the sixth impurity region may beformed at the same time by a same ion implantation process.

In exemplary embodiments, the first conductivity type may correspond ton-type, and the second conductivity type may correspond to p-type.

The first electrode pad may be coupled to a supply voltage, and thesecond electrode pad may be coupled to a ground voltage.

In exemplary embodiments, the first conductivity type may correspond top-type, and the second conductivity type may correspond to n-type.

The first electrode pad may be coupled to a ground voltage, and thesecond electrode pad may be coupled to a supply voltage.

According to exemplary embodiments, an electronic device includes afunctional block and an ESD protection device. The functional block iscoupled between a supply voltage pad, which is coupled to a supplyvoltage, and a ground voltage pad, which is coupled to a ground voltage,and operates using the supply voltage. The ESD protection device iscoupled between the supply voltage pad and the ground voltage pad. TheESD protection device includes a semiconductor substrate, a first well,a second well, a first impurity region, a second impurity region, athird impurity region, and a fourth impurity region. The first well isformed in the semiconductor substrate, and has a first conductivitytype. The second well is formed in the semiconductor substrate, contactsthe first well, and has a second conductivity type. The first impurityregion is formed in the first well, and has the first conductivity type.The second impurity region is formed in the first well, is spaced apartfrom the first impurity region in a direction of the second well, andhas the second conductivity type. The third impurity region is formed inthe second well, and has the second conductivity type. The fourthimpurity region is formed in the second well, is located in a directionof the first well from the third impurity region to contact the thirdimpurity region, has the first conductivity type, and is electricallyfloated. When the first conductivity type corresponds to n-type and thesecond conductivity type corresponds to p-type, the first impurityregion and the second impurity region are electrically connected to thesupply voltage pad, and the third impurity region is electricallyconnected to the ground voltage pad. When the first conductivity typecorresponds to p-type and the second conductivity type corresponds ton-type, the first impurity region and the second impurity region areelectrically connected to the ground voltage pad, and the third impurityregion is electrically connected to the supply voltage pad.

According to exemplary embodiments, an electronic device includes afunctional block and an ESD protection device. The functional block iscoupled to a supply voltage pad, which is coupled to a supply voltage, aground voltage pad, which is coupled to a ground voltage, and a datainput/output pad, and communicates data through the data input/outputpad using the supply voltage. The ESD protection device is coupledbetween the data input/output pad and the ground voltage pad. The ESDprotection device includes a semiconductor substrate, a first well, asecond well, a first impurity region, a second impurity region, a thirdimpurity region, and a fourth impurity region. The first well is formedin the semiconductor substrate, and has a first conductivity type. Thesecond well is formed in the semiconductor substrate, contacts the firstwell, and has a second conductivity type. The first impurity region isformed in the first well, and has the first conductivity type. Thesecond impurity region is formed in the first well, is spaced apart fromthe first impurity region in a direction of the second well, and has thesecond conductivity type. The third impurity region is formed in thesecond well, and has the second conductivity type. The fourth impurityregion is formed in the second well, is located in a direction of thefirst well from the third impurity region to contact the third impurityregion, has the first conductivity type, and is electrically floated.When the first conductivity type corresponds to n-type and the secondconductivity type corresponds to p-type, the first impurity region andthe second impurity region are electrically connected to the datainput/output pad, and the third impurity region is electricallyconnected to the ground voltage pad. When the first conductivity typecorresponds to p-type and the second conductivity type corresponds ton-type, the first impurity region and the second impurity region areelectrically connected to the ground voltage pad, and the third impurityregion is electrically connected to the data input/output pad.

In exemplary embodiments in accordance with principles of inventiveconcepts, an electrostatic discharge protection device includes anavalanche breakdown device including first and second wells of differentconductivity types formed adjacent to one another in a substrate andconfigured to conduct with positive feedback through parasitic bipolartransistors when pads connected to the wells reverse-bias the wells to abreakdown voltage level; and a high-concentration impurity region formedin one well and positioned to reduce the current gain of one of theparasitic bipolar transistors to increase a holding voltage of theavalanche breakdown device.

In exemplary embodiments in accordance with principles of inventiveconcepts, an electrostatic discharge protection device includes ahigh-concentration impurity region is positioned to partially determinethe holding voltage of the avalanche breakdown device according to itsproximity to a high-concentration impurity region formed in the wellother than the well in which it is formed.

In exemplary embodiments in accordance with principles of inventiveconcepts, an electrostatic discharge protection device includes ahigh-concentration impurity region formed at a boundary between thefirst and second wells to decrease the breakdown voltage level.

In exemplary embodiments in accordance with principles of inventiveconcepts, an electrostatic discharge protection device includes a gatethat, in combination with the high concentration impurity region formedat the boundary between the first and second wells and a highconcentration impurity region of the same conductivity type as thatformed at the boundary forms metal oxide semiconductor transistor toreduce the breakdown voltage level.

In exemplary embodiments in accordance with principles of inventiveconcepts, a portable electronic device includes an electrostaticdischarge protection device that includes an avalanche breakdown deviceincluding first and second wells of different conductivity types formedadjacent to one another in a substrate and configured to conduct withpositive feedback through parasitic bipolar transistors when padsconnected to the wells reverse-bias the wells to a breakdown voltagelevel; and a high-concentration impurity region formed in one well andpositioned to reduce the current gain of one of the parasitic bipolartransistors to increase a holding voltage of the avalanche breakdowndevice.

BRIEF DESCRIPTION OF THE DRAWINGS

Illustrative, non-limiting exemplary embodiments will be more clearlyunderstood from the following detailed description in conjunction withthe accompanying drawings.

FIG. 1 is a cross-sectional view of an electrostatic discharge (ESD)protection device according to exemplary embodiments.

FIG. 2 is a diagram illustrating a bipolar junction transistor (BJT)parasitically formed in the ESD protection device of FIG. 1.

FIG. 3 is a circuit diagram illustrating an equivalent circuit of theESD protection device of FIG. 1.

FIG. 4 is a graph illustrating voltage-current characteristics of theESD protection device of FIG. 1.

FIG. 5 is a graph illustrating a variation of a holding voltage of theESD protection device of FIG. 1 according to a width of a fifth impurityregion.

FIG. 6 is a cross-sectional view of an ESD protection device accordingto exemplary embodiments.

FIG. 7 is a diagram illustrating a BJT parasitically formed in the ESDprotection device of FIG. 6.

FIG. 8 is a circuit diagram illustrating an equivalent circuit of theESD protection device of FIG. 6.

FIG. 9 is a cross-sectional view of an ESD protection device accordingto exemplary embodiments.

FIG. 10 is a diagram illustrating a BJT parasitically formed in the ESDprotection device of FIG. 9.

FIG. 11 is a circuit diagram illustrating an equivalent circuit of theESD protection device of FIG. 9.

FIG. 12 is a cross-sectional view of an example of the ESD protectiondevice of FIG. 9.

FIG. 13 is a cross-sectional view of an ESD protection device accordingto exemplary embodiments.

FIG. 14 is a diagram illustrating a BJT parasitically formed in the ESDprotection device of FIG. 13.

FIG. 15 is a circuit diagram illustrating an equivalent circuit of theESD protection device of FIG. 13.

FIG. 16 is a cross-sectional view of an example of the ESD protectiondevice of FIG. 13.

FIG. 17 is a cross-sectional view of an ESD protection device accordingto exemplary embodiments.

FIG. 18 is a diagram illustrating a BJT parasitically formed in the ESDprotection device of FIG. 17.

FIG. 19 is a circuit diagram illustrating an equivalent circuit of theESD protection device of FIG. 17.

FIG. 20 is a cross-sectional view of an example of the ESD protectiondevice of FIG. 17.

FIG. 21 is a cross-sectional view of an ESD protection device accordingto exemplary embodiments.

FIG. 22 is a diagram illustrating a BJT parasitically formed in the ESDprotection device of FIG. 21.

FIG. 23 is a circuit diagram illustrating an equivalent circuit of theESD protection device of FIG. 21.

FIG. 24 is a cross-sectional view of an example of the ESD protectiondevice of FIG. 21.

FIG. 25 is a block diagram illustrating an electronic device accordingto exemplary embodiments.

FIG. 26 is a block diagram illustrating an electronic device accordingto exemplary embodiments.

DETAILED DESCRIPTION OF THE EMBODIMENTS

Various exemplary embodiments will be described more fully withreference to the accompanying drawings, in which some exemplaryembodiments are shown. Inventive concepts may, however, be embodied inmany different forms and should not be construed as limited to theexemplary embodiments set forth herein. Rather, these embodiments areprovided so that this disclosure will be thorough and complete, and willfully convey the scope of the present inventive concept to those skilledin the art. Like reference numerals refer to like elements throughoutthis application.

It will be understood that, although the terms first, second, etc. maybe used herein to describe various elements, these elements should notbe limited by these terms. These terms are used to distinguish oneelement from another. For example, a first element could be termed asecond element, and, similarly, a second element could be termed a firstelement, without departing from the scope of the present inventiveconcept. As used herein, the term “and/or” includes any and allcombinations of one or more of the associated listed items.

It will be understood that when an element is referred to as being“connected” or “coupled” to another element, it can be directlyconnected or coupled to the other element or intervening elements may bepresent. In contrast, when an element is referred to as being “directlyconnected” or “directly coupled” to another element, there are nointervening elements present. Other words used to describe therelationship between elements should be interpreted in a like fashion(e.g., “between” versus “directly between,” “adjacent” versus “directlyadjacent,” etc.).

The terminology used herein is for the purpose of describing particularembodiments and is not intended to be limiting of the inventive concept.As used herein, the singular forms “a,” “an” and “the” are intended toinclude the plural forms as well, unless the context clearly indicatesotherwise. It will be further understood that the terms “comprises,”“comprising,” “includes” and/or “including,” when used herein, specifythe presence of stated features, integers, steps, operations, elements,and/or components, but do not preclude the presence or addition of oneor more other features, integers, steps, operations, elements,components, and/or groups thereof.

Unless otherwise defined, all terms (including technical and scientificterms) used herein have the same meaning as commonly understood by oneof ordinary skill in the art to which this inventive concept belongs. Itwill be further understood that terms, such as those defined in commonlyused dictionaries, should be interpreted as having a meaning that isconsistent with their meaning in the context of the relevant art andwill not be interpreted in an idealized or overly formal sense unlessexpressly so defined herein.

In exemplary embodiments in accordance with principles of inventiveconcepts, an electrostatic discharge protection device includes anavalanche breakdown device including first and second wells of differentconductivity types formed adjacent to one another in a substrate andconfigured to conduct with positive feedback through parasitic bipolartransistors when pads connected to the wells reverse-bias the wells to abreakdown voltage level.

A high-concentration impurity region may be formed in one well andpositioned to reduce the current gain of one of the parasitic bipolartransistors to increase a holding voltage of the avalanche breakdowndevice.

A high-concentration impurity region may be positioned to partiallydetermine the holding voltage of the avalanche breakdown deviceaccording to its proximity to a high-concentration impurity regionformed in the well other than the well in which it is formed.

A high-concentration impurity region may formed at a boundary betweenthe first and second wells to decrease the breakdown voltage level.

A gate that, in combination with the high concentration impurity regionformed at the boundary between the first and second wells and a highconcentration impurity region of the same conductivity type as thatformed at the boundary may be included to form metal oxide semiconductortransistor to reduce the breakdown voltage level.

In exemplary embodiments in accordance with principles of inventiveconcepts, a portable electronic device may include an electrostaticdischarge protection device that includes an avalanche breakdown deviceincluding first and second wells of different conductivity types formedadjacent to one another in a substrate and configured to conduct withpositive feedback through parasitic bipolar transistors when padsconnected to the wells reverse-bias the wells to a breakdown voltagelevel.

A high-concentration impurity region may be formed in one well andpositioned to reduce the current gain of one of the parasitic bipolartransistors to increase a holding voltage of the avalanche breakdowndevice.

A high-concentration impurity region may be positioned to partiallydetermine the holding voltage of the avalanche breakdown deviceaccording to its proximity to a high-concentration impurity regionformed in the well other than the well in which it is formed.

A high-concentration impurity region may formed at a boundary betweenthe first and second wells to decrease the breakdown voltage level.

A gate that, in combination with the high concentration impurity regionformed at the boundary between the first and second wells and a highconcentration impurity region of the same conductivity type as thatformed at the boundary may be included to form metal oxide semiconductortransistor to reduce the breakdown voltage level.

FIG. 1 is a cross-sectional view of an exemplary embodiment of anelectrostatic discharge (ESD) protection device in accordance withprinciples of inventive concepts.

Referring to FIG. 1, an ESD protection device 100 includes asemiconductor substrate SUB 101, a first well 110, a second well 120, afirst impurity region 131, a second impurity region 132, a thirdimpurity region 133, a fourth impurity region 134, a fifth impurityregion 135, a sixth impurity region 136, and a gate GPOLY 140.

The first well 110 is formed in the semiconductor substrate 101 and isof a first conductivity type (also referred to herein as conductivetype).

The second well 120 is formed in the semiconductor substrate 101 tocontact the first well 110 and is of a second conductivity type.

In some exemplary embodiments, the first conductivity type maycorrespond to n-type, and the second conductivity type may correspond top-type. In such exemplary embodiments, the first well 110 may correspondto an n-well and the second well 120 may correspond to a p-well.

Hereinafter, the first conductivity type is assumed to be n-type and thesecond conductivity type is assumed to be p-type.

In this exemplary embodiment, first impurity region N+ 131 is formed inthe first well 110 and is n-type. In some exemplary embodiments, animpurity concentration of the first impurity region 131 may be higherthan an impurity concentration of the first well 110.

In this exemplary embodiment, second impurity region P+ 132 is formed inthe first well 110; is spaced apart from the first impurity region 131in a direction of the second well 120, and is p-type. In some exemplaryembodiments, an impurity concentration of the second impurity region 132may be higher than an impurity concentration of the second well 120.

In this exemplary embodiment, third impurity region P+ 133 is formed inthe second well 120 and is p-type. In some exemplary embodiments, animpurity concentration of the third impurity region 133 may be higherthan the impurity concentration of the second well 120.

In this exemplary embodiment, fourth impurity region N+ 134 is formed inthe second well 120, is spaced apart from the third impurity region 133in a direction of the first well 110, and is n-type. In some exemplaryembodiments, an impurity concentration of the fourth impurity region 134may be higher than the impurity concentration of the first well 110.

In this exemplary embodiment, fifth impurity region P+ 135 is formed inthe second well 120, is spaced apart from the fourth impurity region 134in a direction of the first well 110, and is p-type. In some exemplaryembodiments, an impurity concentration of the fifth impurity region 135may be higher than the impurity concentration of the second well 120.

In this exemplary embodiment, sixth impurity region P+ 136 is formed ata boundary region between the first well 110 and the second well 120, isspaced apart from the second impurity region 132 and the fifth impurityregion 135, and is p-type. In some exemplary embodiments, an impurityconcentration of the sixth impurity region 136 may be higher than theimpurity concentration of the second well 120.

In some exemplary embodiments, the first impurity region 131 and thefourth impurity region 134 may be formed at the same time by the sameion implantation process. In such exemplary embodiments, the impurityconcentrations of the first impurity region 131 and the fourth impurityregion 134 may be substantially the same.

In some exemplary embodiments, the second impurity region 132, the thirdimpurity region 133, the fifth impurity region 135, and the sixthimpurity region 136 may be formed at the same time by a same ionimplantation process. In such exemplary embodiments, the impurityconcentrations of the second impurity region 132, the third impurityregion 133, the fifth impurity region 135, and the sixth impurity region136 may be substantially the same.

In exemplary embodiments, gate 140 is formed above the semiconductorsubstrate 101 between the second impurity region 132 and the sixthimpurity region 136. In some exemplary embodiments, the gate 140 mayinclude polysilicon.

The first impurity region 131, the second impurity region 132, and thegate 140 may be electrically connected to a first electrode pad ESD_HIGH151. The third impurity region 133 and the fourth impurity region 134may be electrically connected to a second electrode pad ESD_LOW 152.

The fifth impurity region 135 and the sixth impurity region 136 may beelectrically floated.

In exemplary embodiments, in operation, first electrode pad 151 may becoupled to a relatively high voltage, and the second electrode pad 152may be coupled to a relatively low voltage. In some exemplaryembodiments, the first electrode pad 151 may be coupled to a supplyvoltage, and the second electrode pad 152 may be coupled to a groundvoltage. In other exemplary embodiments, the first electrode pad 151 maybe coupled to a data input/output pin, and the second electrode pad 152may be coupled to the ground voltage.

As will be described in greater detail later, when an ESD event occurssuch that a plurality of positive charges (or, simply, positive charge)flow in the ESD protection device 100 through the first electrode pad151, the ESD protection device 100 may be turned on to discharge thepositive charges to the second electrode pad 152.

FIG. 2 is a diagram illustrating a bipolar junction transistor (BJT)parasitically formed in the ESD protection device of FIG. 1. FIG. 3 is acircuit diagram illustrating an equivalent circuit of the ESD protectiondevice of FIG. 1.

Referring to FIG. 2, a PNP bipolar junction transistor (BJT) 161 may beparasitically formed in the ESD protection device 100. An emitter of thePNP BJT 161 may correspond to the second impurity region 132, a base ofthe PNP BJT 161 may correspond to the first well 110, and a collector ofthe PNP BJT 161 may correspond to the second well 120 and the thirdimpurity region 133.

In addition, an NPN BJT 162 may be parasitically formed in the ESDprotection device 100. A collector of the NPN BJT 162 may correspond tothe first impurity region 131 and the first well 110, a base of the NPNBJT 162 may correspond to the second well 120, and an emitter of the NPNBJT 162 may correspond to the fourth impurity region 134.

In FIG. 2, the resistance of the first well 110 is represented as ann-well resistor Rnw, and the resistance of the second well 120 isrepresented as a p-well resistor Rpw.

In this manner, an equivalent circuit of the ESD protection device 100of FIG. 1 may be represented as a circuit diagram of FIG. 3.

Hereinafter, operation of the ESD protection device 100 will bedescribed with reference to FIGS. 1 to 3.

When an ESD event occurs, positive charge may flow in the ESD protectiondevice 100 through the first electrode pad 151. Because the positivecharge is transferred to the first well 110, an electric potential ofthe first well 110 may increase as the amount of positive charge flowingin the ESD protection device 100 through the first electrode pad 151increases. Therefore, the first well 110 and the second well 120 may bein a reverse biased state. When the electric potential of the first well110 increases such that an electric potential difference between thefirst well 110 and the second well 120 reaches a breakdown voltage, anavalanche breakdown may occur at a junction of the first well 110 andthe second well 120.

When the avalanche breakdown occurs, electron-hole pairs may begenerated and holes of the electron-hole pairs may be transferred to thesecond well 120 to increase an electric potential of the second well120. When the electric potential of the second well 120 increases suchthat an electric potential difference between the second well 120 andthe fourth impurity region 134 becomes greater than a threshold voltageof the NPN BJT 162, the NPN BJT 162 may be turned on.

When the NPN BJT 162 is turned on, a current may flow from the firstelectrode pad 151 to the second electrode pad 152 through the firstimpurity region 131, the first well 110, the second well 120, and thefourth impurity region 134. While the current flows through the firstwell 110, a voltage drop may occur at the first well 110 by the n-wellresistor Rnw. Therefore, the electric potential of the first well 110may become lower than an electrical potential of the second impurityregion 132, such that the PNP BJT 161 may be turned on.

When the PNP BJT 161 is turned on, a current may flow from the firstelectrode pad 151 to the second electrode pad 152 through the secondimpurity region 132, the first well 110, the second well 120, and thethird impurity region 133. While the current flows through the secondwell 120, a voltage drop may occur at the second well 120 by the p-wellresistor Rpw. Therefore, the electric potential of the second well 120may be maintained higher than an electrical potential of the fourthimpurity region 134, such that the NPN BJT 162 may be turned on morestrongly.

As described above, when an ESD event occurs such that positive chargeflows in the ESD protection device 100 through the first electrode pad151, the PNP BJT 161 and the NPN BJT 162 may be maintained in a turnedon state through positive feedback. Therefore, when the ESD event occurssuch that positive charge flows in the ESD protection device 100 throughthe first electrode pad 151, the ESD protection device 100 may be turnedon to discharge the positive charge to the second electrode pad 152.

A conventional silicon controlled rectifier (SCR) does not include thefifth impurity region 135, the sixth impurity region 136, and the gate140.

As will be described in greater detail below, a triggering voltage ofthe conventional SCR is relatively high and a holding voltage of theconventional SCR is relatively low. Unlike a conventional SCR, the ESDprotection device 100 according to exemplary embodiments of inventiveconcepts may include the sixth impurity region 136, which is formed at aboundary region between the first well 110 and the second well 120, and,because the impurity concentration of the sixth impurity region 136 ishigher than the impurity concentration of the second well 120, thebreakdown voltage, at which an avalanche breakdown occurs at a junctionof the first well 110 and the second well 120, may decrease because ofthe sixth impurity region 136. As a result, the triggering voltage ofthe ESD protection device 100 may be lower than that of a conventionalESD protection device.

In addition, the ESD protection device 100 according to exemplaryembodiments may include the gate 140, which is formed above thesemiconductor substrate 101 between the second impurity region 132 andthe sixth impurity region 136, and is electrically connected to thefirst electrode pad 151. Because the second impurity region 132, thesixth impurity region 136, and the gate 140 form a metal oxidesemiconductor (MOS) transistor, the breakdown voltage, at which anavalanche breakdown occurs at a junction of the first well 110 and thesecond well 120, may be similar to a breakdown voltage of the MOStransistor. As such, a triggering voltage of an ESD protection device100 in accordance with principles of inventive concepts may furtherdecrease.

In addition, the ESD protection device 100 according to exemplaryembodiments may include the fifth impurity region 135, which is formedin the second well 120 to be spaced apart from the fourth impurityregion 134 in a direction of the first well 110. As a result, a distancebetween the first well 110 and the fifth impurity region 135 may besmaller than a distance between the first well 110 and the thirdimpurity region 133. As such, when the PNP BJT 161 is turned on, aportion of the current, which flows from the first electrode pad 151 tothe second electrode pad 152 through the second impurity region 132, thefirst well 110, the second well 120, and the third impurity region 133,may be leaked to the fifth impurity region 135, such that a current gainof the PNP BJT 161 may decrease. Because the holding voltage of the ESDprotection device 100 is inversely proportional to the current gain ofthe PNP BJT 161, the holding voltage of the ESD protection device 100may increase.

FIG. 4 is a graph illustrating voltage-current characteristics of an ESDprotection device in accordance with principles of inventive conceptssuch as that of the exemplary embodiment of FIG. 1.

In FIG. 4, the x-axis represents a voltage of the first electrode pad151, and the y-axis represents a current flowing from the firstelectrode pad 151 to the ESD protection device 100.

In FIG. 4, first graph A represents voltage-current characteristics of aconventional SCR, and second graph B represents voltage-currentcharacteristics of ESD protection device 100 in accordance withprinciples of inventive concepts.

As illustrated in FIG. 4, the conventional SCR, which does not includethe fifth impurity region 135, the sixth impurity region 136, and thegate 140, has a relatively high triggering voltage Vt1 and a relativelylow holding voltage Vh1. On the other hand, the ESD protection device100 in accordance with principles of inventive concepts has a relativelylow triggering voltage Vt2 and a relatively high holding voltage Vh2.

As the width of the fifth impurity region 135 increases, the amount ofcurrent leaked to the fifth impurity region 135 among the currentflowing from the first electrode pad 151 to the second electrode pad 152through the second impurity region 132, the first well 110, the secondwell 120, and the third impurity region 133 when the PNP BJT 161 isturned on may increase. Therefore, as the width of the fifth impurityregion 135 increases, the current gain of the PNP BJT 161 may decreasesuch that the holding voltage of the ESD protection device 100 mayincrease.

Similarly, as the width of the fifth impurity region 135 decreases, theamount of current leaked to the fifth impurity region 135 among thecurrent flowing from the first electrode pad 151 to the second electrodepad 152 through the second impurity region 132, the first well 110, thesecond well 120, and the third impurity region 133 when the PNP BJT 161is turned on may decrease. Therefore, as the width of the fifth impurityregion 135 decreases, the current gain of the PNP BJT 161 may increasesuch that the holding voltage of the ESD protection device 100 maydecrease.

Therefore, in accordance with principles of inventive concepts, theholding voltage of the ESD protection device 100 may be established,based on the width of the fifth impurity region 135.

FIG. 5 is a graph illustrating a variation of a holding voltage of theESD protection device of FIG. 1 according to the width of a fifthimpurity region.

In FIG. 5, the x-axis represents a voltage of the first electrode pad151, and the y-axis represents a current flowing from the firstelectrode pad 151 to the ESD protection device 100.

In FIG. 5, a first graph C represents a holding voltage of the ESDprotection device 100 when the width of the fifth impurity region 135 isrelatively short (or small), and a second graph D represents a holdingvoltage of the ESD protection device 100 when the width of the fifthimpurity region 135 is relatively long (or large).

As illustrated in FIG. 5, the holding voltage of the ESD protectiondevice 100 in accordance with principles of inventive concepts mayincrease as the width of the fifth impurity region 135 increases, andthe holding voltage of the ESD protection device 100 may decrease as thewidth of the fifth impurity region 135 decreases.

As described above with reference to FIGS. 1 to 5, because the ESDprotection device 100 according to exemplary embodiments includes thefifth impurity region 135, the sixth impurity region 136, and the gate140, the ESD protection device 100 may have a relatively low triggeringvoltage and a relatively high holding voltage. In addition, the holdingvoltage of the ESD protection device 100 may be adjusted by controllingthe width of the fifth impurity region 135.

FIG. 6 is a cross-sectional view of an exemplary embodiment of an ESDprotection device in accordance with principles of inventive concepts.

Referring to FIG. 6, an ESD protection device 200 includes asemiconductor substrate SUB 201, a first well 210, a second well 220, afirst impurity region 231, a second impurity region 232, a thirdimpurity region 233, a fourth impurity region 234, a fifth impurityregion 235, a sixth impurity region 236, and a gate GPOLY 240.

The first well 210 is formed in the semiconductor substrate 201 and isof a first conductivity type.

The second well 220 is formed in the semiconductor substrate 201 tocontact the first well 210 and is of a second conductivity type.

In some exemplary embodiments, the first conductivity type may be ap-type, and the second conductivity type may be an n-type. In suchexemplary embodiments, the first well 210 may be a p-well, and thesecond well 220 may be an n-well.

Hereinafter, the first conductivity type is assumed to be p-type, andthe second conductivity type is assumed to be n-type.

The first impurity region P+ 231 is formed in the first well 210 and isof p-type. In some exemplary embodiments, an impurity concentration ofthe first impurity region 231 may be higher than an impurityconcentration of the first well 210.

The second impurity region N+ 232 is formed in the first well 210, isspaced apart from the first impurity region 231 in a direction of thesecond well 220 and is of n-type. In some exemplary embodiments, animpurity concentration of the second impurity region 232 may be higherthan an impurity concentration of the second well 220.

The third impurity region N+ 233 is formed in the second well 220 and isof n-type. In some exemplary embodiments, an impurity concentration ofthe third impurity region 233 may be higher than the impurityconcentration of the second well 220.

The fourth impurity region P+ 234 is formed in the second well 220, isspaced apart from the third impurity region 233 in a direction of thefirst well 210, and is of p-type. In some exemplary embodiments, animpurity concentration of the fourth impurity region 234 may be higherthan the impurity concentration of the first well 210.

The fifth impurity region N+ 235 is formed in the second well 220, isspaced apart from the fourth impurity region 234 in a direction of thefirst well 210, and is of n-type. In some exemplary embodiments, animpurity concentration of the fifth impurity region 235 may be higherthan the impurity concentration of the second well 220.

The sixth impurity region N+ 236 is formed at a boundary region betweenthe first well 210 and the second well 220, is spaced apart from thesecond impurity region 232 and the fifth impurity region 235, and is ofn-type. In some exemplary embodiments, an impurity concentration of thesixth impurity region 236 may be higher than the impurity concentrationof the second well 220.

In some exemplary embodiments, the first impurity region 231 and thefourth impurity region 234 may be formed at the same time by in the sameion implantation process. As a result, the impurity concentrations ofthe first impurity region 231 and the fourth impurity region 234 may besubstantially the same.

In some exemplary embodiments, the second impurity region 232, the thirdimpurity region 233, the fifth impurity region 235, and the sixthimpurity region 236 may be formed at the same time by a same ionimplantation process and, as a result, the impurity concentrations ofthe second impurity region 232, the third impurity region 233, the fifthimpurity region 235, and the sixth impurity region 236 may besubstantially the same.

The gate 240 is formed above the semiconductor substrate 201 between thesecond impurity region 232 and the sixth impurity region 236. In someexemplary embodiments, the gate 240 may include polysilicon.

The first impurity region 231, the second impurity region 232, and thegate 240 may be electrically connected to a first electrode pad ESD_LOW251. The third impurity region 233 and the fourth impurity region 234may be electrically connected to a second electrode pad ESD_HIGH 252.

The fifth impurity region 235 and the sixth impurity region 236 may beelectrically floated.

The first electrode pad 251 may be coupled to a relatively low voltage,and the second electrode pad 252 may be coupled to a relatively highvoltage. In some exemplary embodiments, the first electrode pad 251 maybe coupled to a ground voltage, and the second electrode pad 252 may becoupled to a supply voltage. In other exemplary embodiments, the firstelectrode pad 251 may be coupled to the ground voltage, and the secondelectrode pad 252 may be coupled to a data input/output pin.

As will be described in greater detail later, when an ESD event occurssuch that positive charge flows in the ESD protection device 200 throughthe second electrode pad 252, the ESD protection device 200 may beturned on to discharge the positive charge to the first electrode pad251.

FIG. 7 is a diagram illustrating a BJT parasitically formed in the ESDprotection device of FIG. 6. FIG. 8 is a circuit diagram illustrating anequivalent circuit of the ESD protection device of FIG. 6.

Referring to FIG. 7, a PNP BJT 261 may be parasitically formed in theESD protection device 200. An emitter of the PNP BJT 261 may correspondto the fourth impurity region 234, a base of the PNP BJT 261 maycorrespond to the second well 220, and a collector of the PNP BJT 261may correspond to the first well 210 and the first impurity region 231.

Additionally, an NPN BJT 262 may be parasitically formed in the ESDprotection device 200. A collector of the NPN BJT 262 may correspond tothe third impurity region 233 and the second well 220, a base of the NPNBJT 262 may correspond to the first well 210, and an emitter of the NPNBJT 262 may correspond to the second impurity region 232.

In the exemplary embodiment of FIG. 7, resistance of the first well 210is represented as a p-well resistor Rpw, and resistance of the secondwell 220 is represented as an n-well resistor Rnw.

Therefore, an equivalent circuit of the ESD protection device 200 ofFIG. 6 may be represented as a circuit diagram of FIG. 8.

Hereinafter, an exemplary operation of the ESD protection device 200will be described with reference to FIGS. 6 to 8.

When an ESD event occurs, positive charge may flow in the ESD protectiondevice 200 through the second electrode pad 252. Because the positivecharge is transferred to the second well 220, an electric potential ofthe second well 220 may increase according to the amount of positivecharge flowing in the ESD protection device 200 through the secondelectrode pad 252 increases. As a result, the first well 210 and thesecond well 220 may be in a reverse biased state. When the electricpotential of the second well 220 increases such that an electricpotential difference between the first well 210 and the second well 220reaches a breakdown voltage, an avalanche breakdown may occur at ajunction of the first well 210 and the second well 220.

When the avalanche breakdown occurs, electron-hole pairs may begenerated and holes of the electron-hole pairs may be transferred to thefirst well 210 to increase an electric potential of the first well 210.When the electric potential of the first well 210 increases such that anelectric potential difference between the first well 210 and the secondimpurity region 232 becomes greater than a threshold voltage of the NPNBJT 262, the NPN BJT 262 may be turned on.

When the NPN BJT 262 is turned on, a current may flow from the secondelectrode pad 252 to the first electrode pad 251 through the thirdimpurity region 233, the second well 220, the first well 210, and thesecond impurity region 232. While the current flows through the secondwell 220, a voltage drop may occur at the second well 220 across then-well resistor Rnw. As a result, the electric potential of the secondwell 220 may become lower than an electrical potential of the fourthimpurity region 234, such that the PNP BJT 261 may be turned on.

When the PNP BJT 261 is turned on, a current may flow from the secondelectrode pad 252 to the first electrode pad 251 through the fourthimpurity region 234, the second well 220, the first well 210, and thefirst impurity region 231. While the current flows through the firstwell 210, a voltage drop may occur at the first well 210 across thep-well resistor Rpw. As a result, the electric potential of the firstwell 210 may be maintained at a higher potential than the electricalpotential of the second impurity region 232, with the result that theNPN BJT 262 may be turned on more strongly.

As described above, when an ESD event occurs, resulting in positivecharge flow in the ESD protection device 200 through the secondelectrode pad 252, the PNP BJT 261 and the NPN BJT 262 may be maintainedin a turned on state through positive feedback. As a result, when theESD event occurs, resulting in positive charge flow in the ESDprotection device 200 through the second electrode pad 252, the ESDprotection device 200 may be turned on to discharge positive charge tothe first electrode pad 251.

A conventional silicon controlled rectifier (SCR) does not include thefifth impurity region 235, the sixth impurity region 236, and the gate240 and, as will be described in greater detail below, a triggeringvoltage of a conventional SCR is relatively high and a holding voltageof a conventional SCR is relatively low.

In contrast, an ESD protection device in accordance with principles ofinventive concepts, such as ESD protection device 200 according toexemplary embodiments may include the sixth impurity region 236, whichis formed at a boundary region between the first well 210 and the secondwell 220. Because the impurity concentration of the sixth impurityregion 236 is higher than the impurity concentration of the second well220, the breakdown voltage, at which an avalanche breakdown occurs at ajunction of the first well 210 and the second well 220, may decreasebecause of the sixth impurity region 236. As a result, a triggeringvoltage of the ESD protection device 200 may decrease, in accordancewith principles of inventive concepts.

Additionally, in an ESD protection device in accordance with principlesof inventive concepts, such as ESD protection device 200 according toexemplary embodiments may include the gate 240, which is formed abovethe semiconductor substrate 201 between the second impurity region 232and the sixth impurity region 236, and is electrically connected to thefirst electrode pad 251. Because the second impurity region 232, thesixth impurity region 236, and the gate 240 form a metal oxidesemiconductor (MOS) transistor, the breakdown voltage, at which anavalanche breakdown occurs at a junction of the first well 210 and thesecond well 220, may be similar to a breakdown voltage of the MOStransistor. As a result, a triggering voltage of the ESD protectiondevice 200 may further decrease.

Furthermore, an ESD protection device in accordance with principles ofinventive concepts, such as the ESD protection device 200 according toexemplary embodiments may include the fifth impurity region 235, whichis formed in the second well 220 to be spaced apart from the fourthimpurity region 234 in a direction of the first well 210. As a result, adistance between the first well 210 and the fifth impurity region 235may be smaller than a distance between the first well 210 and the thirdimpurity region 233. As a result, when the NPN BJT 262 is turned on, aportion of the current, which flows from the second electrode pad 252 tothe first electrode pad 251 through the third impurity region 233, thesecond well 220, the first well 210, and the second impurity region 232,may be leaked to the fifth impurity region 235, so that a current gainof the NPN BJT 262 may decrease. Because a holding voltage of the ESDprotection device 200 is inversely proportional to the current gain ofthe NPN BJT 262, the holding voltage of the ESD protection device 200may increase.

As a width of the fifth impurity region 235 increases, the amount of acurrent leaked to the fifth impurity region 235 among the currentflowing from the second electrode pad 252 to the first electrode pad 251through the third impurity region 233, the second well 220, the firstwell 210, and the second impurity region 232 when the NPN BJT 262 isturned on may increase. Therefore, as the width of the fifth impurityregion 235 increases, the current gain of the NPN BJT 262 may decreaseand, as a result, the holding voltage of the ESD protection device 200may increase.

Similarly, as a width of the fifth impurity region 235 decreases, theamount of current leaked to the fifth impurity region 235 among thecurrent flowing from the second electrode pad 252 to the first electrodepad 251 through the third impurity region 233, the second well 220, thefirst well 210, and the second impurity region 232 when the NPN BJT 262is turned on may decrease. As a result, as the width of the fifthimpurity region 235 decreases, the current gain of the NPN BJT 262 mayincrease such that the holding voltage of the ESD protection device 200may decrease and the holding voltage of the ESD protection device 200may be determined based on the width of the fifth impurity region 235.

The ESD protection device 200 of FIG. 6 is the same as the ESDprotection device 100 of FIG. 1 except that conductivity types of thefirst well 210, the second well 220, the first impurity region 231, thesecond impurity region 232, the third impurity region 233, the fourthimpurity region 234, the fifth impurity region 235, and the sixthimpurity region 236 of the ESD protection device 200 of FIG. 6 areopposite to conductivity types of the first well 110, the second well120, the first impurity region 131, the second impurity region 132, thethird impurity region 133, the fourth impurity region 134, the fifthimpurity region 135, and the sixth impurity region 136 of the ESDprotection device 100 of FIG. 1, respectively. Therefore,voltage-current characteristics of the ESD protection device 200 may besimilar to voltage-current characteristics of the ESD protection device100 illustrated in FIGS. 4 and 5.

FIG. 9 is a cross-sectional view of an ESD protection device accordingto exemplary embodiments.

Referring to FIG. 9, an ESD protection device 300 includes asemiconductor substrate SUB 301, a first well 310, a second well 320, afirst impurity region 331, a second impurity region 332, a thirdimpurity region 333, and a fourth impurity region 334.

The first well 310 is formed in the semiconductor substrate 301 and hasa first conductivity type.

The second well 320 is formed in the semiconductor substrate 301 tocontact the first well 310 and has a second conductivity type.

In some exemplary embodiments, the first conductivity type may ben-type, and the second conductivity type may be p-type. In suchexemplary embodiments, the first well 310 may be an n-well, and thesecond well 320 may be a p-well.

For the following description, the first conductivity type is assumed tobe n-type, and the second conductivity type is assumed to be p-type.

The first impurity region N+ 331 is formed in the first well 310 and isof n-type. In some exemplary embodiments, an impurity concentration ofthe first impurity region 331 may be higher than an impurityconcentration of the first well 310.

The second impurity region P+ 332 is formed in the first well 310, isspaced apart from the first impurity region 331 in a direction of thesecond well 320, and is of p-type. In some exemplary embodiments, animpurity concentration of the second impurity region 332 may be higherthan an impurity concentration of the second well 320.

The third impurity region P+ 333 is formed in the second well 320, andis of p-type. In some exemplary embodiments, an impurity concentrationof the third impurity region 333 may be higher than the impurityconcentration of the second well 320.

The fourth impurity region N+ 334 is formed in the second well 320, islocated in a direction of the first well 310 from the third impurityregion 333 and contacts the third impurity region 333, and is of n-type.In some exemplary embodiments, an impurity concentration of the fourthimpurity region 334 may be higher than the impurity concentration of thefirst well 310.

The first impurity region 331 and the second impurity region 332 may beelectrically connected to a first electrode pad ESD_HIGH 351. The thirdimpurity region 333 may be electrically connected to a second electrodepad ESD_LOW 352.

The fourth impurity region 334 may be electrically floated.

The first electrode pad 351 may be coupled to a relatively high voltage,and the second electrode pad 352 may be coupled to a relatively lowvoltage. In some exemplary embodiments, the first electrode pad 351 maybe coupled to a supply voltage, and the second electrode pad 352 may becoupled to a ground voltage. In other exemplary embodiments, the firstelectrode pad 351 may be coupled to a data input/output pin, and thesecond electrode pad 352 may be coupled to the ground voltage.

As will be described in greater detail later, when an ESD event occurssuch that positive charge flows in the ESD protection device 300 throughthe first electrode pad 351, the ESD protection device 300 may be turnedon to discharge the positive charges to the second electrode pad 352.

FIG. 10 is a diagram illustrating a BJT parasitically formed in the ESDprotection device of FIG. 9. FIG. 11 is a circuit diagram illustratingan equivalent circuit of the ESD protection device of FIG. 9.

Referring to FIG. 10, a PNP BJT 361 may be parasitically formed in theESD protection device 300. An emitter of the PNP BJT 361 may correspondto the second impurity region 332, a base of the PNP BJT 361 maycorrespond to the first well 310, and a collector of the PNP BJT 361 maycorrespond to the second well 320 and the third impurity region 333.

In addition, an NPN BJT 362 may be parasitically formed in the ESDprotection device 300. A collector of the NPN BJT 362 may correspond tothe first impurity region 331 and the first well 310, a base of the NPNBJT 362 may correspond to the second well 320, and an emitter of the NPNBJT 362 may correspond to the fourth impurity region 334.

In FIG. 10, resistance of the first well 310 is represented as an n-wellresistor Rnw, and resistance of the second well 320 is represented as ap-well resistor Rpw and an equivalent circuit of the ESD protectiondevice 300 of FIG. 9 may be represented as a circuit diagram of FIG. 11.

As illustrated in FIG. 10, the fourth impurity region 334, whichcorresponds to the emitter of the NPN BJT 362, may not be electricallyconnected to the second electrode pad 352 directly but, rather, may beelectrically connected to the second electrode pad 352 through the thirdimpurity region 333, which contacts the fourth impurity region 334. Thethird impurity region 333 of p-type and the fourth impurity region 334of n-type, which contact each other, may operate as a diode. As aresult, as illustrated in FIG. 11, the equivalent circuit of the ESDprotection device 300 of FIG. 9 may include a diode 370 coupled betweenthe emitter of the NPN BJT 362 and the second electrode pad 352.

Hereinafter, operation of the ESD protection device 300 will bedescribed with reference to FIGS. 9 to 11.

When an ESD event occurs, positive charge may flow in the ESD protectiondevice 300 through the first electrode pad 351. Because the positivecharge is transferred to the first well 310, an electric potential ofthe first well 310 may increase as the amount of positive charge flowingin the ESD protection device 300 through the first electrode pad 351increases. As a result, the first well 310 and the second well 320 maybe in a reverse biased state. When the electric potential of the firstwell 310 increases such that an electric potential difference betweenthe first well 310 and the second well 320 reaches a breakdown voltage,an avalanche breakdown may occur at a junction of the first well 310 andthe second well 320.

When the avalanche breakdown occurs, electron-hole pairs may begenerated and holes of the electron-hole pairs may be transferred to thesecond well 320 to increase an electric potential of the second well320. When the electric potential of the second well 320 increases suchthat an electric potential difference between the second well 320 andthe fourth impurity region 334 becomes greater than a threshold voltageof the NPN BJT 362, the NPN BJT 362 may be turned on.

When the NPN BJT 362 is turned on, a current may flow from the firstelectrode pad 351 to the second electrode pad 352 through the firstimpurity region 331, the first well 310, the second well 320, the fourthimpurity region 334, and the third impurity region 333. While thecurrent flows through the first well 310, a voltage drop may occur atthe first well 310 across the n-well resistor Rnw. As a result, theelectric potential of the first well 310 may become lower than anelectrical potential of the second impurity region 332, such that thePNP BJT 361 may be turned on.

When the PNP BJT 361 is turned on, a current may flow from the firstelectrode pad 351 to the second electrode pad 352 through the secondimpurity region 332, the first well 310, the second well 320, and thethird impurity region 333. While the current flows through the secondwell 320, a voltage drop may occur at the second well 320 across thep-well resistor Rpw. As a result, the electric potential of the secondwell 320 may be maintained higher than an electrical potential of thefourth impurity region 334, such that the NPN BJT 362 may be turned onmore strongly.

As described above, when an ESD event occurs such that positive chargeflows in the ESD protection device 300 through the first electrode pad351, the PNP BJT 361 and the NPN BJT 362 may be maintained in a turnedon state through a positive feedback. As a result, when the ESD eventoccurs such that positive charge flows in the ESD protection device 300through the first electrode pad 351, the ESD protection device 300 maybe turned on to discharge the positive charges to the second electrodepad 352.

As described above with reference to FIGS. 10 and 11, because the ESDprotection device 300 includes the diode 370 coupled between the emitterof the NPN BJT 362 and the second electrode pad 352, a current gain ofthe NPN BJT 362 may decrease because of the diode 370. As a result, aholding voltage of the ESD protection device 300 may increase.

FIG. 12 is a cross-sectional view of an exemplary embodiment of the ESDprotection device of FIG. 9.

Referring to FIG. 12, an ESD protection device 300 a may include a fifthimpurity region 335, a sixth impurity region 336, and a gate GPOLY 340in addition to elements of the ESD protection device 300 of FIG. 9.

The fifth impurity region P+ 335 may be formed in the second well 320,may be spaced apart from the fourth impurity region 334 in a directionof the first well 310, and may be of p-type. In some exemplaryembodiments, an impurity concentration of the fifth impurity region 335may be higher than the impurity concentration of the second well 320.The fifth impurity region 335 may be electrically floated.

The sixth impurity region P+ 336 may be formed at a boundary regionbetween the first well 310 and the second well 320, may be spaced apartfrom the second impurity region 332 and the fifth impurity region 335,and may be of p-type. In some exemplary embodiments, an impurityconcentration of the sixth impurity region 336 may be higher than theimpurity concentration of the second well 320. The sixth impurity region336 may be electrically floated.

In some exemplary embodiments, the first impurity region 331 and thefourth impurity region 334 may be formed at the same time by a same ionimplantation process and, as a result, the impurity concentrations ofthe first impurity region 331 and the fourth impurity region 334 may besubstantially the same.

In some exemplary embodiments, the second impurity region 332, the thirdimpurity region 333, the fifth impurity region 335, and the sixthimpurity region 336 may be formed at the same time by a same ionimplantation process and as a result, the impurity concentrations of thesecond impurity region 332, the third impurity region 333, the fifthimpurity region 335, and the sixth impurity region 336 may besubstantially the same.

The gate 340 may be formed above the semiconductor substrate 301 betweenthe second impurity region 332 and the sixth impurity region 336. Insome exemplary embodiments, the gate 340 may include polysilicon. Thegate 340 may be electrically connected to the first electrode pad 351.

The fifth impurity region 335, the sixth impurity region 336, and thegate 340 included in the ESD protection device 300 a of FIG. 12 may havethe same structure as the fifth impurity region 135, the sixth impurityregion 136, and the gate 140 included in the ESD protection device 100of FIG. 1. As a result, effects of the fifth impurity region 335, thesixth impurity region 336, and the gate 340 on the ESD protection device300 a of FIG. 12 may have the same as effects of the fifth impurityregion 135, the sixth impurity region 136, and the gate 140 on the ESDprotection device 100 of FIG. 1.

That is, as described above with reference to FIGS. 1 to 5, the sixthimpurity region 336 and the gate 340 may decrease a breakdown voltage,at which an avalanche breakdown occurs at a junction of the first well310 and the second well 320. As a result, a triggering voltage of theESD protection device 300 a may decrease.

In addition, the fifth impurity region 335 may decrease a current gainof the PNP BJT 361 and, as a result, a holding voltage of the ESDprotection device 300 a may increase.

In addition, as a width of the fifth impurity region 335 increases, thecurrent gain of the PNP BJT 361 may decrease such that the holdingvoltage of the ESD protection device 300 a may increase. Similarly, asthe width of the fifth impurity region 335 decreases, the current gainof the PNP BJT 361 may increase such that the holding voltage of the ESDprotection device 300 a may decrease. As a result, the holding voltageof the ESD protection device 300 a may be determined based on the widthof the fifth impurity region 335.

As described above with reference to FIGS. 9 to 12, the ESD protectiondevice 300 a according to exemplary embodiments may have a relativelylow triggering voltage and a relatively high holding voltage. Inaddition, the holding voltage of the ESD protection device 300 a may beadjusted by controlling the width of the fifth impurity region 335.

FIG. 13 is a cross-sectional view of an ESD protection device accordingto exemplary embodiments.

Referring to FIG. 13, an ESD protection device 400 includes asemiconductor substrate SUB 401, a first well 410, a second well 420, afirst impurity region 431, a second impurity region 432, a thirdimpurity region 433, and a fourth impurity region 434.

The first well 410 is formed in the semiconductor substrate 401 and hasa first conductivity type.

The second well 420 is formed in the semiconductor substrate 401 tocontact the first well 410 and has a second conductivity type.

In some exemplary embodiments, the first conductivity type maycorrespond to p-type, and the second conductivity type may correspond ton-type. In this case, the first well 410 may correspond to a p-well, andthe second well 420 may correspond to an n-well.

Hereinafter, in this exemplary embodiment the first conductivity type isassumed to be p-type, and the second conductivity type is assumed to ben-type.

The first impurity region P+ 431 is formed in the first well 410 and isof p-type. In some exemplary embodiments, an impurity concentration ofthe first impurity region 431 may be higher than an impurityconcentration of the first well 410.

The second impurity region N+ 432 is formed in the first well 410, isspaced apart from the first impurity region 431 in a direction of thesecond well 420, and is of n-type. In some exemplary embodiments, animpurity concentration of the second impurity region 432 may be higherthan an impurity concentration of the second well 420.

The third impurity region N+ 433 is formed in the second well 420 and isof n-type. In some exemplary embodiments, an impurity concentration ofthe third impurity region 433 may be higher than the impurityconcentration of the second well 420.

The fourth impurity region P+ 434 is formed in the second well 420, islocated in a direction of the first well 410 from the third impurityregion 433 and contacts the third impurity region 433, and is of p-type.In some exemplary embodiments, an impurity concentration of the fourthimpurity region 434 may be higher than the impurity concentration of thefirst well 410.

The first impurity region 431 and the second impurity region 432 may beelectrically connected to a first electrode pad ESD_LOW 451. The thirdimpurity region 433 may be electrically connected to a second electrodepad ESD_HIGH 452.

The fourth impurity region 434 may be electrically floated.

The first electrode pad 451 may be coupled to a relatively low voltage,and the second electrode pad 452 may be coupled to a relatively highvoltage. In some exemplary embodiments, the first electrode pad 451 maybe coupled to a ground voltage, and the second electrode pad 452 may becoupled to a supply voltage. In other exemplary embodiments, the firstelectrode pad 451 may be coupled to the ground voltage, and the secondelectrode pad 452 may be coupled to a data input/output pin.

As will be described in greater detail later, when an ESD event occurssuch that positive charge flows in the ESD protection device 400 throughthe second electrode pad 452, the ESD protection device 400 may beturned on to discharge the positive charge to the first electrode pad451.

FIG. 14 is a diagram illustrating a BJT parasitically formed in the ESDprotection device of FIG. 13. FIG. 15 is a circuit diagram illustratingan equivalent circuit of the ESD protection device of FIG. 13.

Referring to FIG. 14, a PNP BJT 461 may be parasitically formed in theESD protection device 400. An emitter of the PNP BJT 461 may correspondto the fourth impurity region 434, a base of the PNP BJT 461 maycorrespond to the second well 420, and a collector of the PNP BJT 461may correspond to the first well 410 and the first impurity region 431.

Additionally, an NPN BJT 462 may be parasitically formed in the ESDprotection device 400. A collector of the NPN BJT 462 may correspond tothe third impurity region 433 and the second well 420, a base of the NPNBJT 462 may correspond to the first well 410, and an emitter of the NPNBJT 462 may correspond to the second impurity region 432.

In FIG. 14, resistance of the first well 410 is represented as a p-wellresistor Rpw, and resistance of the second well 420 is represented as ann-well resistor Rnw. As a result, an equivalent circuit of the ESDprotection device 400 of FIG. 13 may be represented as a circuit diagramof FIG. 15.

As illustrated in FIG. 14, the fourth impurity region 434, whichcorresponds to the emitter of the PNP BJT 461, may not be electricallyconnected to the second electrode pad 452 directly but may instead beelectrically connected to the second electrode pad 452 through the thirdimpurity region 433, which contacts the fourth impurity region 434. Thethird impurity region 433 of n-type and the fourth impurity region 434of p-type, which contact each other, may operate as a diode. As aresult, as illustrated in FIG. 15, the equivalent circuit of the ESDprotection device 400 of FIG. 13 may include a diode 470 coupled betweenthe emitter of the PNP BJT 461 and the second electrode pad 452.

Hereinafter, operation of an ESD protection device in accordance withprinciples of inventive concepts, such as the ESD protection device 400,will be described with reference to FIGS. 13 to 15.

When an ESD event occurs, positive charge may flow in the ESD protectiondevice 400 through the second electrode pad 452. Because the positivecharge is transferred to the second well 420, an electric potential ofthe second well 420 may increase as the amount of positive chargeflowing in the ESD protection device 400 through the second electrodepad 452 increases. As a result, the first well 410 and the second well420 may be in a reverse biased state. When the electric potential of thesecond well 420 increases such that an electric potential differencebetween the first well 410 and the second well 420 reaches a breakdownvoltage, an avalanche breakdown may occur at a junction of the firstwell 410 and the second well 420.

When the avalanche breakdown occurs, electron-hole pairs may begenerated and holes of the electron-hole pairs may be transferred to thefirst well 410 to increase an electric potential of the first well 410.When the electric potential of the first well 410 increases such that anelectric potential difference between the first well 410 and the secondimpurity region 432 becomes greater than a threshold voltage of the NPNBJT 462, the NPN BJT 462 may be turned on.

When the NPN BJT 462 is turned on, a current may flow from the secondelectrode pad 452 to the first electrode pad 451 through the thirdimpurity region 433, the second well 420, the first well 410, and thesecond impurity region 432. While the current flows through the secondwell 420, a voltage drop may occur at the second well 420 across then-well resistor Rnw. As a result, the electric potential of the secondwell 420 may become lower than an electrical potential of the fourthimpurity region 434, such that the PNP BJT 461 may be turned on.

When the PNP BJT 461 is turned on, a current may flow from the secondelectrode pad 452 to the first electrode pad 451 through the thirdimpurity region 433, the fourth impurity region 434, the second well420, the first well 410, and the first impurity region 431. While thecurrent flows through the first well 410, a voltage drop may occur atthe first well 410 by the p-well resistor Rpw. As a result, the electricpotential of the first well 410 may be maintained higher than anelectrical potential of the second impurity region 432, such that theNPN BJT 462 may be turned on more strongly.

As described above, when an ESD event occurs such that positive chargeflow in the ESD protection device 400 through the second electrode pad452, the PNP BJT 461 and the NPN BJT 462 may be maintained in a turnedon state through positive feedback. As a result, when the ESD eventoccurs such that positive charge flow in the ESD protection device 400through the second electrode pad 452, the ESD protection device 400 maybe turned on to discharge the positive charge to the first electrode pad451.

As described above with reference to FIGS. 14 and 15, because the ESDprotection device 400 includes the diode 470 coupled between the emitterof the PNP BJT 461 and the second electrode pad 452, a current gain ofthe PNP BJT 461 may decrease because of the diode 470 and, as a result,a holding voltage of the ESD protection device 400 may increase.

FIG. 16 is a cross-sectional view of an exemplary embodiment of the ESDprotection device of FIG. 13.

Referring to FIG. 16, an ESD protection device 400 a may further includea fifth impurity region 435, a sixth impurity region 436, and a gateGPOLY 440 from the ESD protection device 400 of FIG. 13.

The fifth impurity region N+ 435 may be formed in the second well 420,may be spaced apart from the fourth impurity region 434 in a directionof the first well 410, and may be of n-type. In some exemplaryembodiments, an impurity concentration of the fifth impurity region 435may be higher than the impurity concentration of the second well 420.The fifth impurity region 435 may be electrically floated.

The sixth impurity region N+ 436 may be formed at a boundary regionbetween the first well 410 and the second well 420, may be spaced apartfrom the second impurity region 432 and the fifth impurity region 435,and may be of n-type. In some exemplary embodiments, an impurityconcentration of the sixth impurity region 436 may be higher than theimpurity concentration of the second well 420. The sixth impurity region436 may be electrically floated.

In some exemplary embodiments, the first impurity region 431 and thefourth impurity region 434 may be formed at the same time by a same ionimplantation process and, as a result, the impurity concentrations ofthe first impurity region 431 and the fourth impurity region 434 may besubstantially the same.

In some exemplary embodiments, the second impurity region 432, the thirdimpurity region 433, the fifth impurity region 435, and the sixthimpurity region 436 may be formed at the same time by a same ionimplantation process and, as a result, the impurity concentrations ofthe second impurity region 432, the third impurity region 433, the fifthimpurity region 435, and the sixth impurity region 436 may besubstantially the same.

The gate 440 may be formed above the semiconductor substrate 401 betweenthe second impurity region 432 and the sixth impurity region 436. Insome exemplary embodiments, the gate 440 may include polysilicon. Thegate 440 may be electrically connected to the first electrode pad 451.

The fifth impurity region 435, the sixth impurity region 436, and thegate 440 included in the ESD protection device 400 a of FIG. 16 may havethe same structure as the fifth impurity region 235, the sixth impurityregion 236, and the gate 240 included in the ESD protection device 200of FIG. 6. As a result, effects of the fifth impurity region 435, thesixth impurity region 436, and the gate 440 on the ESD protection device400 a of FIG. 16 may have the same as effects as those of the fifthimpurity region 235, the sixth impurity region 236, and the gate 240 onthe ESD protection device 200 of FIG. 6.

That is, as described above with reference to FIGS. 6 to 8, the sixthimpurity region 436 and the gate 440 may decrease a breakdown voltage,at which an avalanche breakdown occurs at a junction of the first well410 and the second well 420 and, consequently, a triggering voltage ofthe ESD protection device 400 a may decrease.

In addition, the fifth impurity region 435 may decrease a current gainof the NPN BJT 462 and, consequently, a holding voltage of the ESDprotection device 400 a may increase.

In addition, as a width of the fifth impurity region 435 increases, thecurrent gain of the NPN BJT 462 may decrease such that the holdingvoltage of the ESD protection device 400 a may increase. Similarly, asthe width of the fifth impurity region 435 decreases, the current gainof the NPN BJT 462 may increase such that the holding voltage of the ESDprotection device 400 a may decrease. As a result, the holding voltageof the ESD protection device 400 a may be determined based on the widthof the fifth impurity region 435.

As described above with reference to FIGS. 13 to 16, the ESD protectiondevice 400 a according to exemplary embodiments may have a relativelylow triggering voltage and a relatively high holding voltage. Inaddition, the holding voltage of the ESD protection device 400 a may beadjusted by controlling the width of the fifth impurity region 435.

FIG. 17 is a cross-sectional view of an ESD protection device accordingto exemplary embodiments.

Referring to FIG. 17, an ESD protection device 500 includes asemiconductor substrate SUB 501, a first well 510, a second well 520, afirst impurity region 531, a second impurity region 532, a thirdimpurity region 533, and a fourth impurity region 534.

The first well 510 is formed in the semiconductor substrate 501 and hasa first conductivity type.

The second well 520 is formed in the semiconductor substrate 501 tocontact the first well 510 and has a second conductivity type.

In some exemplary embodiments, the first conductivity type maycorrespond to p-type, and the second conductivity type may correspond ton-type. In such exemplary embodiments, the first well 510 may correspondto a p-well, and the second well 520 may correspond to an n-well.

Hereinafter, in this exemplary embodiment, the first conductivity typeis assumed to be p-type, and the second conductivity type is assumed tobe n-type.

The first impurity region P+ 531 is formed in the first well 510 and isof p-type. In some exemplary embodiments, an impurity concentration ofthe first impurity region 531 may be higher than an impurityconcentration of the first well 510.

The second impurity region N+ 532 is formed in the first well 510, isspaced apart from the first impurity region 531 in a direction of thesecond well 520, and is of n-type. In some exemplary embodiments, animpurity concentration of the second impurity region 532 may be higherthan an impurity concentration of the second well 520.

The third impurity region N+ 533 is formed in the second well 520 and isof n-type. In some exemplary embodiments, an impurity concentration ofthe third impurity region 533 may be higher than the impurityconcentration of the second well 520.

The fourth impurity region P+ 534 is formed in the second well 520, islocated in a direction of the first well 510 from the third impurityregion 533 and contacts the third impurity region 533, and is of p-type.In some exemplary embodiments, an impurity concentration of the fourthimpurity region 534 may be higher than the impurity concentration of thefirst well 510.

The first impurity region 531 and the second impurity region 532 may beelectrically connected to a first electrode pad ESD_LOW 551. The thirdimpurity region 533 may be electrically connected to a second electrodepad ESD_HIGH 552.

The fourth impurity region 534 may be electrically floated.

The first electrode pad 551 may be coupled to a relatively low voltage,and the second electrode pad 552 may be coupled to a relatively highvoltage. In some exemplary embodiments, the first electrode pad 551 maybe coupled to a ground voltage, and the second electrode pad 552 may becoupled to a supply voltage. In other exemplary embodiments, the firstelectrode pad 551 may be coupled to the ground voltage, and the secondelectrode pad 552 may be coupled to a data input/output pin.

As will be described in greater detail later, when an ESD event occurssuch that positive charge flows in the ESD protection device 500 throughthe second electrode pad 552, the ESD protection device 500 may beturned on to discharge the positive charges to the first electrode pad551.

FIG. 18 is a diagram illustrating a BJT parasitically formed in the ESDprotection device of FIG. 17. FIG. 19 is a circuit diagram illustratingan equivalent circuit of the ESD protection device of FIG. 17.

Referring to FIG. 18, a PNP BJT 561 may be parasitically formed in theESD protection device 500. An emitter of the PNP BJT 561 may correspondto the fourth impurity region 534, a base of the PNP BJT 561 maycorrespond to the second well 520, and a collector of the PNP BJT 561may correspond to the first well 510 and the first impurity region 531.

In addition, an NPN BJT 562 may be parasitically formed in the ESDprotection device 500. A collector of the NPN BJT 562 may correspond tothe third impurity region 533 and the second well 520, a base of the NPNBJT 562 may correspond to the first well 510, and an emitter of the NPNBJT 562 may correspond to the second impurity region 532.

In FIG. 18, resistance of the first well 510 is represented as a p-wellresistor Rpw, and resistance of the second well 520 is represented as ann-well resistor Rnw. An equivalent circuit of the ESD protection device500 of FIG. 17 may be represented as a circuit diagram of FIG. 19.

As illustrated in FIG. 18, the fourth impurity region 534, whichcorresponds to the emitter of the PNP BJT 561, may not be electricallyconnected to the second electrode pad 552 directly, but may instead beelectrically connected to the second electrode pad 552 through the thirdimpurity region 533, which contacts the fourth impurity region 534. Thethird impurity region 533 of n-type and the fourth impurity region 534of p-type, which contact each other, may operate as a diode. As aresult, as illustrated in FIG. 19, the equivalent circuit of the ESDprotection device 500 of FIG. 17 may include a diode 570 coupled betweenthe emitter of the PNP BJT 561 and the second electrode pad 552.

Hereinafter, operation of an ESD protection device in accordance withprinciples of inventive concepts, such as ESD protection device 500 willbe described with reference to FIGS. 17 to 19.

When an ESD event occurs, positive charge may flow in the ESD protectiondevice 500 through the second electrode pad 552. Because the positivecharge is transferred to the second well 520, an electric potential ofthe second well 520 may increase as an amount of the positive chargesflowing in the ESD protection device 500 through the second electrodepad 552 increases. As a result, the first well 510 and the second well520 may be in a reverse biased state. When the electric potential of thesecond well 520 increases such that an electric potential differencebetween the first well 510 and the second well 520 reaches a breakdownvoltage, an avalanche breakdown may occur at a junction of the firstwell 510 and the second well 520.

When the avalanche breakdown occurs, electron-hole pairs may begenerated and holes of the electron-hole pairs may be transferred to thefirst well 510 to increase an electric potential of the first well 510.When the electric potential of the first well 510 increases such that anelectric potential difference between the first well 510 and the secondimpurity region 532 becomes greater than a threshold voltage of the NPNBJT 562, the NPN BJT 562 may be turned on.

When the NPN BJT 562 is turned on, current may flow from the secondelectrode pad 552 to the first electrode pad 551 through the thirdimpurity region 533, the second well 520, the first well 510, and thesecond impurity region 532. While the current flows through the secondwell 520, a voltage drop may occur at the second well 520 across then-well resistor Rnw. As a result, the electric potential of the secondwell 520 may become lower than an electrical potential of the fourthimpurity region 534, such that the PNP BJT 561 may be turned on.

When the PNP BJT 561 is turned on, a current may flow from the secondelectrode pad 552 to the first electrode pad 551 through the thirdimpurity region 533, the fourth impurity region 534, the second well520, the first well 510, and the first impurity region 531. While thecurrent flows through the first well 510, a voltage drop may occur atthe first well 510 across the p-well resistor Rpw. As a result, theelectric potential of the first well 510 may be maintained higher thanan electrical potential of the second impurity region 532, such that theNPN BJT 562 may be turned on more strongly.

As described above, when an ESD event occurs such that positive chargeflow in the ESD protection device 500 through the second electrode pad552, the PNP BJT 561 and the NPN BJT 562 may be maintained in a turnedon state through positive feedback. As a result, when the ESD eventoccurs such that positive charge flow in the ESD protection device 500through the second electrode pad 552, the ESD protection device 500 maybe turned on to discharge the positive charges to the first electrodepad 551.

As described above with reference to FIGS. 18 and 19, because the ESDprotection device 500 includes the diode 570 coupled between the emitterof the PNP BJT 561 and the second electrode pad 552, a current gain ofthe PNP BJT 561 may decrease because of the diode 570 and, as a result,a holding voltage of the ESD protection device 500 may increase.

FIG. 20 is a cross-sectional view of an exemplary embodiment of an ESDprotection device in accordance with principles of inventive concepts,such as that of FIG. 17.

Referring to FIG. 20, an ESD protection device such as device 500 a mayfurther include a fifth impurity region 535, a sixth impurity region536, and a gate GPOLY 540 from the ESD protection device 500 of FIG. 17.

The fifth impurity region P+ 535 may be formed in the first well 510,may be spaced apart from the second impurity region 532 in a directionof the second well 520, and may be of p-type. In some exemplaryembodiments, an impurity concentration of the fifth impurity region 535may be higher than the impurity concentration of the first well 510. Thefifth impurity region 535 may be electrically floated.

The sixth impurity region P+ 536 may be formed at a boundary regionbetween the first well 510 and the second well 520, may be spaced apartfrom the fourth impurity region 534 and the fifth impurity region 535,and may be of p-type. In some exemplary embodiments, an impurityconcentration of the sixth impurity region 536 may be higher than theimpurity concentration of the first well 510. The sixth impurity region536 may be electrically floated.

In some exemplary embodiments, the second impurity region 532 and thethird impurity region 533 may be formed at the same time by a same ionimplantation process and, as a result, the impurity concentrations ofthe second impurity region 532 and the third impurity region 533 may besubstantially the same.

In some exemplary embodiments, the first impurity region 531, the fourthimpurity region 534, the fifth impurity region 535, and the sixthimpurity region 536 may be formed at the same time by a same ionimplantation process and, as a result, the impurity concentrations ofthe first impurity region 531, the fourth impurity region 534, the fifthimpurity region 535, and the sixth impurity region 536 may besubstantially the same.

The gate 540 may be formed above the semiconductor substrate 501 betweenthe fourth impurity region 534 and the sixth impurity region 536. Insome exemplary embodiments, the gate 540 may include polysilicon. Thegate 540 may be electrically connected to the second electrode pad 552.

The fifth impurity region 535, the sixth impurity region 536, and thegate 540 included in the ESD protection device 500 a of FIG. 20 may havethe same structure as the fifth impurity region 135, the sixth impurityregion 136, and the gate 140 included in the ESD protection device 100of FIG. 1. As a result, effects of the fifth impurity region 535, thesixth impurity region 536, and the gate 540 on the ESD protection device500 a of FIG. 20 may have the same as effects as those of the fifthimpurity region 135, the sixth impurity region 136, and the gate 140 onthe ESD protection device 100 of FIG. 1.

That is, as described above with reference to FIGS. 1 to 5, the sixthimpurity region 536 and the gate 540 may decrease a breakdown voltage,at which an avalanche breakdown occurs at a junction of the first well510 and the second well 520. As a result, a triggering voltage of theESD protection device 500 a may decrease.

In addition, the fifth impurity region 535 may decrease a current gainof the PNP BJT 561. As a result, a holding voltage of the ESD protectiondevice 500 a may increase.

In addition, as a width of the fifth impurity region 535 increases, thecurrent gain of the PNP BJT 561 may decrease such that the holdingvoltage of the ESD protection device 500 a may increase. Similarly, asthe width of the fifth impurity region 535 decreases, the current gainof the PNP BJT 561 may increase such that the holding voltage of the ESDprotection device 500 a may decrease. As a result, the holding voltageof the ESD protection device 500 a may be determined based on the widthof the fifth impurity region 535.

As described above with reference to FIGS. 17 to 20, the ESD protectiondevice 500 a according to exemplary embodiments may have a relativelylow triggering voltage and a relatively high holding voltage. Inaddition, the holding voltage of the ESD protection device 500 a may beadjusted by controlling the width of the fifth impurity region 535.

FIG. 21 is a cross-sectional view an exemplary embodiment of an ESDprotection device in accordance with principles of inventive concepts.

Referring to FIG. 21, an ESD protection device 600 includes asemiconductor substrate SUB 601, a first well 610, a second well 620, afirst impurity region 631, a second impurity region 632, a thirdimpurity region 633, and a fourth impurity region 634.

The first well 610 is formed in the semiconductor substrate 601 and hasa first conductivity type.

The second well 620 is formed in the semiconductor substrate 601 tocontact the first well 610 and has a second conductivity type.

In some exemplary embodiments, the first conductivity type maycorrespond to n-type, and the second conductivity type may correspond top-type. In such embodiments, the first well 610 may correspond to ann-well, and the second well 620 may correspond to a p-well.

Hereinafter, in this exemplary embodiment the first conductivity type isassumed to be n-type, and the second conductivity type is assumed to bep-type.

The first impurity region N+ 631 is formed in the first well 610 and isof n-type. In some exemplary embodiments, an impurity concentration ofthe first impurity region 631 may be higher than an impurityconcentration of the first well 610.

The second impurity region P+ 632 is formed in the first well 610, isspaced apart from the first impurity region 631 in a direction of thesecond well 620, and is of p-type. In some exemplary embodiments, animpurity concentration of the second impurity region 632 may be higherthan an impurity concentration of the second well 620.

The third impurity region P+ 633 is formed in the second well 620 and isof p-type. In some exemplary embodiments, an impurity concentration ofthe third impurity region 633 may be higher than the impurityconcentration of the second well 620.

The fourth impurity region N+ 634 is formed in the second well 620, islocated in a direction of the first well 610 from the third impurityregion 633 and contacts the third impurity region 633, and is of n-type.In some exemplary embodiments, an impurity concentration of the fourthimpurity region 634 may be higher than the impurity concentration of thefirst well 610.

The first impurity region 631 and the second impurity region 632 may beelectrically connected to a first electrode pad ESD_HIGH 651. The thirdimpurity region 633 may be electrically connected to a second electrodepad ESD_LOW 652.

The fourth impurity region 634 may be electrically floated.

The first electrode pad 651 may be coupled to a relatively high voltage,and the second electrode pad 652 may be coupled to a relatively lowvoltage. In some exemplary embodiments, the first electrode pad 651 maybe coupled to a supply voltage, and the second electrode pad 652 may becoupled to a ground voltage. In other exemplary embodiments, the firstelectrode pad 651 may be coupled to a data input/output pin, and thesecond electrode pad 652 may be coupled to the ground voltage.

As will be described in greater detail later, when an ESD event occurssuch that positive charge flows in the ESD protection device 600 throughthe first electrode pad 651, the ESD protection device 600 may be turnedon to discharge the positive charges to the second electrode pad 652.

FIG. 22 is a diagram illustrating a BJT parasitically formed in the ESDprotection device of FIG. 21. FIG. 23 is a circuit diagram illustratingan equivalent circuit of the ESD protection device of FIG. 21.

Referring to FIG. 22, a PNP BJT 661 may be parasitically formed in theESD protection device 600. An emitter of the PNP BJT 661 may correspondto the second impurity region 632, a base of the PNP BJT 661 maycorrespond to the first well 610, and a collector of the PNP BJT 661 maycorrespond to the second well 620 and the third impurity region 633.

In addition, an NPN BJT 662 may be parasitically formed in the ESDprotection device 600. A collector of the NPN BJT 662 may correspond tothe first impurity region 631 and the first well 610, a base of the NPNBJT 662 may correspond to the second well 620, and an emitter of the NPNBJT 662 may correspond to the fourth impurity region 634.

In FIG. 22, resistance of the first well 610 is represented as an n-wellresistor Rnw, and resistance of the second well 620 is represented as ap-well resistor Rpw.

As a result, an equivalent circuit of the ESD protection device 600 ofFIG. 21 may be represented as a circuit diagram of FIG. 23.

As illustrated in FIG. 22, the fourth impurity region 634, whichcorresponds to the emitter of the NPN BJT 662, may not be electricallyconnected to the second electrode pad 652 directly but, rather, may beelectrically connected to the second electrode pad 652 through the thirdimpurity region 633, which contacts the fourth impurity region 634. Thethird impurity region 633 of p-type and the fourth impurity region 634of n-type, which contact each other, may operate as a diode. As aresult, as illustrated in FIG. 23, the equivalent circuit of the ESDprotection device 600 of FIG. 21 may include a diode 670 coupled betweenthe emitter of the NPN BJT 662 and the second electrode pad 652.

Hereinafter, operation of the ESD protection device 600 will bedescribed with reference to FIGS. 21 to 23.

When an ESD event occurs, positive charge may flow in the ESD protectiondevice 600 through the first electrode pad 651. Because positive chargeis transferred to the first well 610, an electric potential of the firstwell 610 may increase as an amount of positive charge flowing in the ESDprotection device 600 through the first electrode pad 651 increases. Asa result, the first well 610 and the second well 620 may be in a reversebiased state. When the electric potential of the first well 610increases such that an electric potential difference between the firstwell 610 and the second well 620 reaches a breakdown voltage, anavalanche breakdown may occur at a junction of the first well 610 andthe second well 620.

When the avalanche breakdown occurs, electron-hole pairs may begenerated and holes of the electron-hole pairs may be transferred to thesecond well 620 to increase an electric potential of the second well620. When the electric potential of the second well 620 increases suchthat an electric potential difference between the second well 620 andthe fourth impurity region 634 becomes greater than a threshold voltageof the NPN BJT 662, the NPN BJT 662 may be turned on.

When the NPN BJT 662 is turned on, a current may flow from the firstelectrode pad 651 to the second electrode pad 652 through the firstimpurity region 631, the first well 610, the second well 620, the fourthimpurity region 634, and the third impurity region 633. While thecurrent flows through the first well 610, a voltage drop may occur atthe first well 610 across the n-well resistor Rnw. As a result, theelectric potential of the first well 610 may become lower than anelectrical potential of the second impurity region 632, such that thePNP BJT 661 may be turned on.

When the PNP BJT 661 is turned on, a current may flow from the firstelectrode pad 651 to the second electrode pad 652 through the secondimpurity region 632, the first well 610, the second well 620, and thethird impurity region 633. While the current flows through the secondwell 620, a voltage drop may occur at the second well 620 across thep-well resistor Rpw. As a result, the electric potential of the secondwell 620 may be maintained higher than an electrical potential of thefourth impurity region 634, such that the NPN BJT 662 may be turned onmore strongly.

As described above, when an ESD event occurs such that positive chargeflows in the ESD protection device 600 through the first electrode pad651, the PNP BJT 661 and the NPN BJT 662 may be maintained in a turnedon state through a positive feedback. As a result, when the ESD eventoccurs such that positive charge flow in the ESD protection device 600through the first electrode pad 651, the ESD protection device 600 maybe turned on to discharge the positive charges to the second electrodepad 652.

As described above with reference to FIGS. 22 and 23, because the ESDprotection device 600 includes the diode 670 coupled between the emitterof the NPN BJT 662 and the second electrode pad 652, a current gain ofthe NPN BJT 662 may decrease because of the diode 670 and, as a result,a holding voltage of the ESD protection device 600 may increase.

FIG. 24 is a cross-sectional view of an exemplary of the ESD protectiondevice of FIG. 21.

Referring to FIG. 24, an ESD protection device 600 a may further includea fifth impurity region 635, a sixth impurity region 636, and a gateGPOLY 640 from the ESD protection device 600 of FIG. 21.

The fifth impurity region N+ 635 may be formed in the first well 610,may be spaced apart from the second impurity region 632 in a directionof the second well 620, and may be of n-type. In some exemplaryembodiments, an impurity concentration of the fifth impurity region 635may be higher than the impurity concentration of the first well 610. Thefifth impurity region 635 may be electrically floated.

The sixth impurity region N+ 636 may be formed at a boundary regionbetween the first well 610 and the second well 620, may be spaced apartfrom the fourth impurity region 634 and the fifth impurity region 635,and may be of n-type. In some exemplary embodiments, an impurityconcentration of the sixth impurity region 636 may be higher than theimpurity concentration of the first well 610. The sixth impurity region636 may be electrically floated.

In some exemplary embodiments, the second impurity region 632 and thethird impurity region 633 may be formed at the same time by a same ionimplantation process and, as a result, the impurity concentrations ofthe second impurity region 632 and the third impurity region 633 may besubstantially the same.

In some exemplary embodiments, the first impurity region 631, the fourthimpurity region 634, the fifth impurity region 635, and the sixthimpurity region 636 may be formed at the same time by a same ionimplantation process and, as a result, the impurity concentrations ofthe first impurity region 631, the fourth impurity region 634, the fifthimpurity region 635, and the sixth impurity region 636 may besubstantially the same.

The gate 640 may be formed above the semiconductor substrate 601 betweenthe fourth impurity region 634 and the sixth impurity region 636. Insome exemplary embodiments, the gate 640 may include polysilicon. Thegate 640 may be electrically connected to the second electrode pad 652.

The fifth impurity region 635, the sixth impurity region 636, and thegate 640 included in the ESD protection device 600 a of FIG. 24 may havethe same structure as the fifth impurity region 235, the sixth impurityregion 236, and the gate 240 included in the ESD protection device 200of FIG. 6. As a result, effects of the fifth impurity region 635, thesixth impurity region 636, and the gate 640 on the ESD protection device600 a of FIG. 24 may be the same as effects of the fifth impurity region235, the sixth impurity region 236, and the gate 240 on the ESDprotection device 200 of FIG. 6.

That is, as described above with reference to FIGS. 6 to 8, the sixthimpurity region 636 and the gate 640 may decrease a breakdown voltage,at which an avalanche breakdown occurs at a junction of the first well610 and the second well 620 and, as a result, a triggering voltage ofthe ESD protection device 600 a may decrease.

In addition, the fifth impurity region 635 may decrease a current gainof the NPN BJT 662 and, as a result, a holding voltage of the ESDprotection device 600 a may increase.

In addition, as a width of the fifth impurity region 635 increases, thecurrent gain of the NPN BJT 662 may decrease such that the holdingvoltage of the ESD protection device 600 a may increase. Similarly, asthe width of the fifth impurity region 635 decreases, the current gainof the NPN BJT 662 may increase such that the holding voltage of the ESDprotection device 600 a may decrease. As a result, the holding voltageof the ESD protection device 600 a may be determined based on the widthof the fifth impurity region 635.

As described above with reference to FIGS. 21 to 24, the ESD protectiondevice 600 a according to exemplary embodiments may have a relativelylow triggering voltage and a relatively high holding voltage. Inaddition, the holding voltage of the ESD protection device 600 a may beadjusted by controlling the width of the fifth impurity region 635.

FIG. 25 is a block diagram illustrating an electronic device accordingto exemplary embodiments.

Referring to FIG. 25, an electronic device 700 includes a functionalblock 710 and an ESD protection device 720.

The functional block 710 is coupled between a supply voltage pad VDD_P,which is coupled to a supply voltage VDD, and a ground voltage padGND_P, which is coupled to a ground voltage GND. The functional block710 operates using the supply voltage VDD. In some exemplaryembodiments, the functional block 710 may include at least one of anapplication processor, a data input/output circuit, a logic circuit, anda memory device.

The ESD protection device 720 is coupled between the supply voltage padVDD_P and the ground voltage pad GND_P. When an ESD event occurs suchthat positive charge flow in the ESD protection device 720 through thesupply voltage pad VDD_P, the ESD protection device 720 may be turned onto discharge the positive charges to the ground voltage pad GND_P.

The ESD protection device 720 may be implemented with an ESD protectiondevice in accordance with principles of inventive concepts, such as oneof the exemplary ESD protection devices, 100 of FIG. 1, the ESDprotection device 200 of FIG. 6, the ESD protection device 300 of FIG.9, the ESD protection device 400 of FIG. 13, the ESD protection device500 of FIG. 17, and the ESD protection device 600 of FIG. 21.

When the ESD protection device 720 is implemented with an ESD protectiondevice in accordance with principles of inventive concepts, such as oneof the ESD protection device 100 of FIG. 1, the ESD protection device300 of FIG. 9, and the ESD protection device 600 of FIG. 21, the firstelectrode pad 151, 351, and 651 of the ESD protection device 100, theESD protection device 300, and the ESD protection device 600 maycorrespond to the supply voltage pad VDD_P and the second electrode pad152, 352, and 652 of the ESD protection device 100, the ESD protectiondevice 300, and the ESD protection device 600 may correspond to theground voltage pad GND_P.

When the ESD protection device 720 is implemented with an ESD protectiondevice in accordance with principles of inventive concepts, such as oneof the ESD protection device 200 of FIG. 6, the ESD protection device400 of FIG. 13, and the ESD protection device 500 of FIG. 17, the firstelectrode pad 251, 451, and 551 of the ESD protection device 200, theESD protection device 400, and the ESD protection device 500 maycorrespond to the ground voltage pad GND_P and the second electrode pad252, 452, and 552 of the ESD protection device 200, the ESD protectiondevice 400, and the ESD protection device 500 may correspond to thesupply voltage pad VDD_P.

Structures and operations of the ESD protection device 100 of FIG. 1,the ESD protection device 200 of FIG. 6, the ESD protection device 300of FIG. 9, the ESD protection device 400 of FIG. 13, the ESD protectiondevice 500 of FIG. 17, and the ESD protection device 600 of FIG. 21 aredescribed above with reference to FIGS. 1 to 24. As a result, detaileddescription about the ESD protection device 720 will not be repeatedhere.

In some exemplary embodiments, the electronic device 700 may be portableelectronic device, such as a smart phone, a mobile phone, a personaldigital assistant (PDA), a portable multimedia player (PMP), a digitalcamera, a music player, a portable game console, a navigation system, alaptop computer, etc.

FIG. 26 is a block diagram illustrating an electronic device accordingto exemplary embodiments.

Referring to FIG. 26, an electronic device 800 includes a functionalblock 810 and an ESD protection device 820.

The functional block 810 is coupled to a supply voltage pad VDD_P, whichis coupled to a supply voltage VDD, a ground voltage pad GND_P, which iscoupled to a ground voltage GND, and a data input/output pad I/O_P. Thefunctional block 810 communicates data DQ through the data input/outputpad I/O_P using the supply voltage VDD. In some exemplary embodiments,the functional block 810 may include at least one of an applicationprocessor, a data input/output circuit, a logic circuit, and a memorydevice.

The ESD protection device 820 is coupled between the data input/outputpad I/O_P and the ground voltage pad GND_P. When an ESD event occurssuch that positive charge flow in the ESD protection device 820 throughthe data input/output pad I/O_P, the ESD protection device 820 may beturned on to discharge the positive charges to the ground voltage padGND_P.

The ESD protection device 820 in accordance with principles of inventiveconcepts may be implemented with one of the exemplary ESD protectiondevice 100 of FIG. 1, the ESD protection device 200 of FIG. 6, the ESDprotection device 300 of FIG. 9, the ESD protection device 400 of FIG.13, the ESD protection device 500 of FIG. 17, and the ESD protectiondevice 600 of FIG. 21, for example.

When the ESD protection device 820 in accordance with principles ofinventive concepts is implemented with one of the exemplary ESDprotection device 100 of FIG. 1, the ESD protection device 300 of FIG.9, and the ESD protection device 600 of FIG. 21, the first electrode pad151, 351, and 651 of the ESD protection device 100, the ESD protectiondevice 300, and the ESD protection device 600 may correspond to the datainput/output pad I/O_P and the second electrode pad 152, 352, and 652 ofthe ESD protection device 100, the ESD protection device 300, and theESD protection device 600 may correspond to the ground voltage padGND_P.

When the ESD protection device 820 in accordance with principles ofinventive concepts is implemented with one of the exemplary ESDprotection device 200 of FIG. 6, the ESD protection device 400 of FIG.13, and the ESD protection device 500 of FIG. 17, the first electrodepad 251, 451, and 551 of the ESD protection device 200, the ESDprotection device 400, and the ESD protection device 500 may correspondto the ground voltage pad GND_P and the second electrode pad 252, 452,and 552 of the ESD protection device 200, the ESD protection device 400,and the ESD protection device 500 may correspond to the datainput/output pad I/O_P.

Structures and operations of the ESD protection device 100 of FIG. 1,the ESD protection device 200 of FIG. 6, the ESD protection device 300of FIG. 9, the ESD protection device 400 of FIG. 13, the ESD protectiondevice 500 of FIG. 17, and the ESD protection device 600 of FIG. 21 aredescribed above with reference to FIGS. 1 to 24. As a result, detaileddescription of the ESD protection device 820 will not be repeated here.

In some exemplary embodiments, the electronic device 800 may be aportable electronic device, such as a smart phone, a mobile phone, apersonal digital assistant (PDA), a portable multimedia player (PMP), adigital camera, a music player, a portable game console, a navigationsystem, a laptop computer, etc.

The foregoing is illustrative of inventive concepts and is not to beconstrued as limiting thereof. Although exemplary embodiments have beendescribed, those skilled in the art will readily appreciate that manymodifications are possible in the exemplary embodiments withoutmaterially departing from the novel teachings and advantages ofinventive concepts. Accordingly, all such modifications are intended tobe included within the scope of inventive concepts as defined in theclaims. As a result, it is to be understood that the foregoing isillustrative of various exemplary embodiments and is not to be construedas limited to the specific exemplary embodiments disclosed, and thatmodifications to the disclosed exemplary embodiments, as well as otherexemplary embodiments, are intended to be included within the scope ofthe appended claims.

What is claimed is:
 1. An electrostatic discharge (ESD) protectiondevice, comprising: a semiconductor substrate; a first well formed inthe semiconductor substrate, the first well having a first conductivitytype; a second well formed in the semiconductor substrate, the secondwell contacting the first well, and having a second conductivity type; afirst impurity region formed in the first well, the first impurityregion having the first conductivity type and being electricallyconnected to a first electrode pad; a second impurity region formed inthe first well, the second impurity region being spaced apart from thefirst impurity region in a direction of the second well, having thesecond conductivity type, and being electrically connected to the firstelectrode pad; a third impurity region formed in the second well, thethird impurity region having the second conductivity type and beingelectrically connected to a second electrode pad; a fourth impurityregion formed in the second well, the fourth impurity region beingspaced apart from the third impurity region in a direction of the firstwell, having the first conductivity type, and being electricallyconnected to the second electrode pad; a fifth impurity region formed inthe second well, the fifth impurity region being spaced apart from thefourth impurity region in a direction of the first well, having thesecond conductivity type, and being electrically floated; a sixthimpurity region formed at a boundary region between the first well andthe second well, the sixth impurity region having the secondconductivity type, and being electrically floated; and a gate formedabove the semiconductor substrate between the second impurity region andthe sixth impurity region that have a same conductivity type, the gatebeing electrically connected to the first electrode pad, wherein thesecond impurity region and the sixth impurity region are formedsymmetric with respect to the gate.
 2. The ESD protection device ofclaim 1, wherein an impurity concentration of the fifth impurity regionand an impurity concentration of the sixth impurity region are higherthan an impurity concentration of the second well.
 3. The ESD protectiondevice of claim 1, wherein a holding voltage of the ESD protectiondevice is determined based on a width of the fifth impurity region. 4.The ESD protection device of claim 1, wherein impurity concentrations ofthe first impurity region and the fourth impurity region aresubstantially the same, and impurity concentrations of the secondimpurity region, the third impurity region, the fifth impurity region,and the sixth impurity region are substantially the same.
 5. The ESDprotection device of claim 1, wherein the first impurity region and thefourth impurity region are formed at the same time by a same ionimplantation process, and the second impurity region, the third impurityregion, the fifth impurity region, and the sixth impurity region areformed at the same time by a same ion implantation process.
 6. The ESDprotection device of claim 1, wherein the first conductivity typecorresponds to n-type, and the second conductivity type corresponds top-type.
 7. The ESD protection device of claim 6, wherein the firstelectrode pad is coupled to a supply voltage, and the second electrodepad is coupled to a ground voltage.
 8. The ESD protection device ofclaim 1, wherein the first conductivity type corresponds to p-type, andthe second conductivity type corresponds to n-type.
 9. The ESDprotection device of claim 8, wherein the first electrode pad is coupledto a ground voltage, and the second electrode pad is coupled to a supplyvoltage.
 10. The ESD protection device of claim 1, wherein the firstconductivity type corresponds to n-type, and the second conductivitytype corresponds to p-type.